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愛銳精密科技大連有限公司地址
咨詢熱線：156-4099-6933
地址：大連市金州區(qū)金馬路120號福佳國際大廈611室
郵編：116000
QQ在線：416288331，1229431320
電話：0411-8718-9285
傳真：0411-8718-9293
Email：info@airytech.com

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主要代理品牌匯總

愛銳精密科技大連有限公司主要代理品牌匯總

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ETCH蝕刻陶瓷環(huán)

 

愛銳精密科技大連有限公司，AMAT，LAM，NOVELLUS， TEL， VARIAN， MATTSON等設備的專用氧化鋁，藍寶石，石英，氧化釔等各種材質(zhì)刻蝕環(huán)

產(chǎn)品采用高純度氧化鋁材料，藍寶石，石英材料，氧化釔材質(zhì)經(jīng)成型，后期精密機械加工，研磨，清洗等工藝，后期經(jīng)過無塵室嚴格清洗管理，真空包裝后提供給客戶。得到國內(nèi)及日本，韓國，美國等眾多世界知名大廠的采用，產(chǎn)品質(zhì)量穩(wěn)定，精度高，可以得到高品質(zhì)的半導體IC產(chǎn)品。

以下為本公司可以根據(jù)圖紙?zhí)栠M行確認生產(chǎn)的產(chǎn)品。當然也可以根據(jù)客戶的需要按圖紙進行進行定制，如果您有需求向本司咨詢。

NO. Maker? Wafer Size? OEM No.? Part Name? Material?
1 AMAT? 200 0200-00261? CHAMBER INSERT 200MM? Al2O3?
2 AMAT? 200 0200-00468? IMP FEEDTHRU INSULATOR? Al2O3?
3 AMAT? 200 0200-00624? NCRS PURGE RING, WXZ+? Al2O3?
4 AMAT? 200 0200-00632? RING SHADOW(3MM)NCRS? Al2O3?
5 AMAT? 200 0200-00945? CAPTURE RING? Al2O3?
6 AMAT? 200 0200-01009? Modified Top Nozzle? AlN?
7 AMAT? 200 0200-09083? QUARTZ SHIELD? Quartz?
8 AMAT? 200 0200-10284? LIFT PIN BK? Al2O3?
9 AMAT? 200 0200-10377? SINGLE RING? Al2O3?
10 AMAT? 200 0200-18081? COVER LOW PROFILE? Al2O3?
11 AMAT? 200 0200-18095? COLLAR MINCONTACT_TELTEC? Al2O3?
12 AMAT? 200 0200-18109? Ceramic Collar_HHNEC? Al2O3?
13 AMAT? 200 0200-20055? INSULATOR ANTENAE PCII TI PED? Quartz?
14 AMAT? 200 0200-20285? PEDESTAL COVER UPPER 8"? Al2O3?
15 AMAT? 200 0200-20331? IMP Cover Ring? Al2O3?
16 AMAT? 200 0200-35287? Ceramic Base Al2O3?
17 AMAT? 200 0200-35290? HOUSING GAS FEED BKCeramic Base Al2O3?
18 AMAT? 200 0200-35291? PLUG GAS NOZZLE BK? Al2O3?
19 AMAT? 200 0200-35293? WINDOW MANOMETER PORT BK? Al2O3?
20 AMAT? 200 0200-35295? HOUSING GAS FEED DPS A3 CH BK? Al2O3?
21 AMAT? 200 0200-35296? GAS PLUG BK? Al2O3?
22 AMAT? 200 0200-35576? HP TXZ LID ISOLATOR_Polishing Repair? Al2O3?
23 AMAT? 200 0200-35611? LID LINER SCREW(CERAMIC) BK? Al2O3?
24 AMAT? 200 0200-36659? SHADOW RING (Q'tz)? Quartz?
25 AMAT? 200 0200-36686? Ceramic Single Ring? Al2O3?
26 AMAT? 200 0200-39133? WINDOW END POINT PORT? Al2O3?
27 AMAT? 200 0200-39135? WINDOW MANOMETER PORT? Al2O3?
28 AMAT? 200 0200-39137? DPS Poly Dome? Al2O3?
29 AMAT? 200 0200-39144? RING FOCUS 195MM SNNF 1.38? Al2O3?
30 AMAT? 200 0200-40126? THIN BLADE(CERAMIC)? Al2O3?
31 AMAT? 200 0200-50132? Capture Ring? Al2O3?
32 LAM? 200 716-330045-001? RING EDGE 9408 ESC 202_HC? Al2O3?
33 LAM? 200 716-330045-002? (L)EDGE RING(PTX)￠202 Al2O3?
34 LAM? 200 716-330120-001? CERAMIC WINDOW FLAT Al2O3?
35 LAM? 200 716-330890-001? Uniformity Ring? Al2O3?
36 LAM? 200 716-330892-007? ALLIANCE 9600 GDP? Al2O3?
37 LAM? 200 716-331051-006? UNIFORMITY RING? Al2O3?
38 Novellus? 200 15-109921-00? C-PEC_200mm? AlN?
39 Novellus? 200 15-158185-00? NANO CLEAN CE TUBE? Al2O3?
40 TEL? 200 1810-329022-11? Adapter Liner (Y2O3 Coating)? Metal?
41 TEL? 200 1D10-304010-12? RING SHIELD B3? Al2O3?
42 AMAT? 300 0010-28101? PRODUCER LIFT PIN HOOP? Al2O3?
43 AMAT? 300 0020-05896? Ring Deposition Clean CIP2? Al2O3?
44 AMAT? 300 0021-43884? DPSII POLY AL LIFT PIN? Y2O3?
45 AMAT? 300 0030-52157? Clamp Lower Center Gas Feed? Al2O3?
46 AMAT? 300 0200-00576? Pin Weight? Al2O3?
47 AMAT? 300 0200-00933? SCREW COVER (DPS2)? Al2O3?
48 AMAT? 300 0200-00970? Ceramic Lid? Al2O3?
49 AMAT? 300 0200-01326? INSULATOR SOURCE ADAPTOR Ceramic? Al2O3?
50 AMAT? 300 0200-01427? ISOLATOR CERAMIC CVD? Al2O3?
51 AMAT? 300 0200-01461? Gas Nozzle? Al2O3?
52 AMAT? 300 0200-01521? BLADE? Al2O3?
53 AMAT? 300 0200-01766? Manifold? Al2O3?
54 AMAT? 300 0200-01863? CERAMIC ESC COVER? Al2O3?
55 AMAT? 300 0200-01991? RING FINGER LIFT PRODUCER? Al2O3?
56 AMAT? 300 0200-02262? Insulator Coil Support? AlN?
57 AMAT? 300 0200-02396? LINER CERAMIC MIDDLE? Al2O3?
58 AMAT? 300 0200-02421? ISOLATOR LID TOP CERAMIC? Al2O3?
59 AMAT? 300 0200-02469? ManiFold? Al2O3?
60 AMAT? 300 0200-02747? CERAMIC LID (DPS2)? Al2O3?
61 AMAT? 300 0200-02967? CERAMIC INJECTOR (DPS2)? Al2O3?
62 AMAT? 300 0200-02972? Pumping Liner C-Channel? Al2O3?
63 AMAT? 300 0200-03200? Ceramic Capture Ring C TYPE DPS 2? Al2O3?
64 AMAT? 300 0200-03314? LIFT 170 FIXED FLOATING 300? Al2O3?
65 AMAT? 300 0200-03317? Ceramic Cover Ring C TYPE 300mm DPS 2? Al2O3?
66 AMAT? 300 0200-03433? ESC ceramic Bushing? Al2O3?
67 AMAT? 300 0200-03598? Ceramic Lid? Al2O3?
68 AMAT? 300 0200-03837? INTERNAL INSULATOR? Al2O3?
69 AMAT? 300 0200-03969? Pumping Liner SR Top? Al2O3?
70 AMAT? 300 0200-04086? Shadow Ring? AlN?
71 AMAT? 300 0200-04146? TOP LINER(PRO)? Al2O3?
72 AMAT? 300 0200-04294? Top Baffle_8 Hole_ALN? AlN?
73 AMAT? 300 0200-04372? Gas Nozzle Middle (STI) AlN?
74 AMAT? 300 0200-04474? PRODUCER CERAMIC HOLDER ￠7.2 Al2O3?
75 AMAT? 300 0200-04654? Pumping Liner Top SIH4 Producer SE  Al2O3?
76 AMAT? 300 0200-04864? Ceramic Plug Al2O3?
77 AMAT? 300 0200-04969? WELDMENT? Al2O3?
78 AMAT? 300 0200-05003? OPUS GAS INJECTOR_Y2O3? Al2O3?
79 AMAT? 300 0200-05031? PLUG SLIT COVER? Al2O3?
80 AMAT? 300 0200-05081? SIDE NOZZLE 1.76 AlN 14MILS? AlN?
81 AMAT? 300 0200-05465? GAS INJECTOR(AE POLY)? Al2O3?
82 AMAT? 300 0200-05593? AMAT HDP ULTIMA AlN BAFFLE  AlN?
83 AMAT? 300 0200-05896? No-Arc Deposition Ring Al2O3?
84 AMAT? 300 0200-05912? LIFT PIN? Y2O3?
85 AMAT? 300 0200-05959? G5 Single Ring? Quartz?
86 AMAT? 300 0200-06404? OPUS Ceramic Lid? Al2O3?
87 AMAT? 300 0200-06405? CERAMIC LID? Al2O3?
88 AMAT? 300 0200-06504? Ultima Top Nozzle AlN?
89 AMAT? 300 0200-06615? G5 LID Y2O3?
90 AMAT? 300 0200-06616? MINOS GAS INJECTOR? Y2O3?
91 AMAT? 300 0200-06641? OPUS FOCUS RING? Al2O3?
92 AMAT? 300 0200-06702? Producer Lift Pin Guide? Al2O3?
93 AMAT? 300 0200-06801? SIDE NOZZLE Φ0.46? AlN?
94 AMAT? 300 0200-06840? Producer Lift Pin? Al2O3?
95 AMAT? 300 0200-06842? Producer Lift Pin Holder? Al2O3?
96 AMAT? 300 0200-07102? GES G5 Injector? Y2O3?
97 AMAT? 300 0200-07916? LIFT PIN? Al2O3?
98 AMAT? 300 0200-07917? Lift Weight? Al2O3?
99 AMAT? 300 0200-07956? LIFT PIN 139 TRIANGULAR (Y2O3) Al2O3?
100 AMAT? 300 0200-07957? LIFT PIN WEIGHT Al2O3?
101 AMAT? 300 0200-20492? IMP COIL SUPPORT CAP2? Al2O3?
102 AMAT? 300 0200-20494? IMP COIL SUPPORT CAP1? Al2O3?
103 AMAT? 300 0200-76050? COVER,300MM PEDESTAL B101,Ce? Al2O3?
104 AMAT? 300 0200-76057? RING,COVER 300MM B101 IMP? Al2O3?
105 AMAT? 300 0200-04593? DPS POLY LIFT PIN? Al2O3?
106 AMAT? 300 0200-06870? Deposition Ring? Al2O3?
107 LAM? 300 715-330825-006? Manifold Liner? Al2O3?
108 LAM? 300 715-331211-002? CHAMBER WALL LINER? Al2O3?
109 LAM? 300 716-003473-802? (ACME) CERAMIC GAS INJECTOR? Al2O3?
110 LAM? 300 716-003481-822? LAM KIYO CX Window? Al2O3?
111 LAM? 300 716-026652-832? BASE FOCUS RING? Al2O3?
112 LAM? 300 716-031257-561? TOP EDGE RING? Y2O3?
113 LAM? 300 716-031257-839? CERAMIC EDGE RING? Al2O3?
114 LAM? 300 716-057993-003? KIYO EX CERAMIC GAS INJECTOR? Al2O3, Y2O3?
115 LAM? 300 716-067667-005? Ceramic Top Edge Ring_CT (T14.9)? Al2O3?
116 LAM? 300 716-140163-261? Hot Edge Ring 15DEG ESC? SILICON?
117 LAM? 300 716-800330-062? INSULATOR BOT ESC TAPPED? Al2O3?
118 LAM? 300 716-065573-004? Lower PEZ Ring? Y2O3?
119 LAM? 300 716-003481-803? (ACME) Ceramic Window_(UC2 Coating)_M12-UC2 Marking? Al2O3?
120 LAM? 300 719-003481-858? LAM KIYO Crystal Window? Al2O3?
121 Mattson? 300 1010434 RING, FOCUS PARADIGM? Y2O3?
122 Novellus? 300 15-003394-02? SPINDLE FORK? Al2O3?
123 Novellus? 300 15-118123-00? RING INSULATOR ANOD PVD300? Al2O3?
124 Novellus? 300 15-122178-00? VECTOR CARRIER RING? Al2O3?
125 Novellus? 300 15-127251-01? Novellus C3 Speed AlN PEC? AlN?
126 Novellus? 300 15-169666-00? R-TYPE LONG INJECTOR 9.07"? AlN?
127 Novellus? 300 15-251538-00? SAPPHIRE PIN? SAPPHIRE?
128 Novellus? 300 15-256077-02? VECTOR EBR BLADE? Al2O3?
129 Novellus? 300 15-257351-00? SAPPHIRE PIN NEW TYPE? SAPPHIRE?
130 Novellus? 300 15-265330-01? STAR INJECTOR DONUT ￠2.08 AlN?
131 Novellus? 300 15-273669-00? Upper Shield Ring Al2O3?
132 Novellus? 300 15-281612-00? RING LTM INSULATOR? Al2O3?
133 Novellus? 300 15-287254-00? INSERT NUT CERAMIC? Al2O3?
134 Novellus? 300 15-292820-00? Ceramic Finger? Al2O3?
135 Novellus? 300 15-293564-00? Blade Load/Unload MCA? Al2O3?
136 Novellus? 300 15-303364-00? C3 SPACER DISK PEDESTAl? Al2O3?
137 Novellus? 300 15-306819-00? SHIELD_CERAMIC RING 125_? Al2O3?
138 Novellus? 300 15-307708-00? Plug ESC Cermic A? Al2O3?
139 Novellus? 300 15-307709-00? Plug ESC Cermic B? Al2O3?
140 Novellus? 300 15-318364-00? AlN STAR Wheel 1.375L AlN?
141 Novellus? 300 15-325002-00? CARRIER RING CERAMIC? Al2O3?
142 Novellus? 300 15-327924-00? INOVA WAFER LIFT PIN(SUS)? INCONEL?
143 Novellus? 300 15-344259-00? CARRIER RING AHM? Al2O3?
144 Novellus? 300 15-362613-01? Sapphire Pin _Short? SAPPHIRE?
145 Novellus? 300 15-385384-00? SHIELD_CERAMIC INSULATOR? Al2O3?
146 TEL? 300 1D10-315649-12? Window Shield Depo_(Y2O3)? Al2O3?
147 TEL? 300 3D10-101176-11? DIVERGE PLATE SHIN? Al2O3?
148 TEL? 300 3M10-253256-11? STAGE OUTER RING? Al2O3?
149 TEL? 300 3M10-307933-12? OUTER RING D320TI? Al2O3?
150 TEL? 300 3M10-308691-12? LIFER ARM 300T? Al2O3?
151 TEL? 300 3M10-312714-11? PICK, TRIAS LM TAPER? Al2O3?
152 TEL? 300 3M10-406003-12? SCREW,M4X10_ALO? Al2O3?
153 TEL? 300 3M10-409088-11? TEL Trias Lift Pin? Al2O3?
154 TEL? 300 3M10-409092-11? Guide Long Pin Wrap Nut? Al2O3?
155 TEL? 300 3M10-451143-11? PIN,TAPER WRAP? Al2O3?
156 TEL? 300 3M10-451144-12? GUIDE,TAPER PIN WRAP? Al2O3?
157 TEL? 300 3M10-455875-11? PLATE GAS DIST? Al2O3?
158 Varian? 300 E17270580? FILAMENT INSULATOR? Al2O3?
159 Varian? 300 E17296280? Insulator Dual Mount? Al2O3?
160 AMAT? 　 0200-00298? DPS Metal Dome? Al2O3?
161 AMAT? 　 0200-00453? Pin Guide(18x6.3x45.5)? Al2O3?
162 AMAT? 　 0200-00454? Bushing Lift Pin? Al2O3?
163 AMAT? 　 0200-02397? Liner Ceramic Bottom? Al2O3?
164 AMAT? 　 0200-02677? Depo Ring_ALPS? Al2O3?
165 AMAT? 　 0200-04977? ISULATOR BUSHING(15*15.6)? AlN?
166 AMAT? 　 0200-05112? Ultima Side Nozzle AlN?
167 AMAT? 　 0200-05238? AlN HDP Side Nozzle Φ0.36? AlN?
168 AMAT? 　 0200-06112? Wafer Blade? Al2O3?
169 AMAT? 　 0200-24018? 0200-24018 PIN ANTENNA BK? Al2O3?
170 Novellus? 　 15-034333-00? TUBE INJECTOR 4"? Al2O3?
171 Novellus? 　 15-052375-00? Ceramic Finger? Al2O3?
172 Novellus? 　 15-053394-03? SPINDLE FORK BK? Al2O3?
173 Novellus? 　 15-169667-00? INJECTOR SHORT OPEN TUBE? AlN?
174 Novellus? 　 15-251847-00? INJECTOR SHORT CLOSED? AlN?

 

 

 

 

 

 

KEYWORDS：AMAT，LAM，NOVELLUS， TEL， VARIAN， MATTSON等設備的專用氧化鋁，藍寶石，石英，氧化釔等各種材質(zhì)刻蝕環(huán)，ETCH RING, FOCUS RING,半導體刻蝕備件

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